The LPSI/LPS2 Series offered by Servoflo Corporation of Lexington, MA, are ultra low differential pressure sensors measuring from 0.1” to 5” of water in various non-directional or bi-directional calibration ranges. Based on a MEMS thermo-anemometer, the LPSI/LPS2 Series infers differential pressure from a nano-liters per second gas flow through an integrated airflow channel.
The on-chip circuitry provides analog amplification and temperature compensation to send an accurate linear output over a wide temperature range (±2.5% FS from 5°C - 55°C). The LSP1 comes in various ranges from 0.1 to 2 in. of water while the LPS2 is available from ranges between 1 to 5 in. of water. Standard input voltage is 5VDC, and a 3V model is also available.