The Center for Laser and Photonics Research (CLPR) strives to advance the emerging field of photonics research and development at Oklahoma State University (Stillwater, OK). The CLPR operations cover all aspects of photonics, from basic research in lasers and materials to applied device development and implementation of nanotechnological advances.
To strengthen Oklahoma's infrastructure for high-tech research, the CLPR has sponsored construction of the first multidisciplinary cleanroom facility for materials synthesis, processing, device fabrication, and testing in the state. The facility includes Class 100 (M3.5), Class 10,000 (M5.5), and Class 100,000 (M6.5) cleanrooms for semiconductor processing and device fabrication, including photolithographic tools and a metal-organic chemical vapor deposition reactor for advanced semiconductor thin film growth. The 6,000-sq-ft facility comprises clean spaces, personnel and material airlocks, a conventional analytical laboratory area, and mechanical and electrical support spaces.