The 760S/780S Ultra-High Purity thermal mass flowmeters are designed to provide a variety of self-diagnostic and field-adjustment features, as well as the ability to confirm or “field-validate” the meter’s calibration and measurement accuracy in the field. The meters are constructed of 316L electropolished tubing with a 7-10 Ra or 20-25 Ra interior finish and are engineered for gas distribution service in semiconductor fabs, pharmaceutical production, and other ultraclean processes.
